Surface of submicrocrystalline nickel after sputtering by Ar ions with 5 keV energy at different incidence angle of ions

R.K. Khisamov, R.R. Timiryaev, I.M. Safarov, R.R. Mulyukov show affiliations and emails
Received 27 March 2020; Accepted 17 April 2020;
This paper is written in Russian
Citation: R.K. Khisamov, R.R. Timiryaev, I.M. Safarov, R.R. Mulyukov. Surface of submicrocrystalline nickel after sputtering by Ar ions with 5 keV energy at different incidence angle of ions. Lett. Mater., 2020, 10(2) 223-226
BibTex   https://doi.org/10.22226/2410-3535-2020-2-223-226

Abstract

The surface of SMC nickel after sputtering with 5 keV argon ions at an angle of 60The surface of submicrocrystalline nickel was studied after sputtering by Ar ions with an energy of 5 keV at the ion incidence angles of 0, 30 and 60°. The submicrocrystalline structure in samples with an average grain size of 350 nm was obtained by high pressure torsion under the pressure of 5 GPa at room temperature. Comparative measurements were performed for coarse-grained samples with an average grain size of 16 µm. As a result of sputtering at normal incidence of ions, etching pits appeared on the surface of the samples. On the coarse-grained samples, the pits had the diameter of about 2 – 5 µm, on the submicrocrystalline samples up to 1 µm. After sputtering of coarse-grained samples at an angle of 30° terraces and ripples on the surface of grains appeared. On the slopes of the protruding grains the vertical grooves have formed that extend from the base of the grains to their top, where they connect with the edges of the terraces at the top. Some grains are not fully formed pyramids, lying at an angle to the surface. On the surface of a submicrocrystalline sample sputtered at an angle of 30°, the pyramids have appeared evenly distributed over the entire surface and lying at an angle to the sample. After sputtering at an angle of 60°, the pyramids with a height of several micrometers were formed on the surface of the coarse-grained sample, lying at an angle to the surface. On the slopes of the pyramids also appeared grooves that extend to the top and connect with the terraces at the top. On the submicrocrystalline sample sputtered at this angle, a set of cones evenly distributed over the surface with a curvature radius at the top of the order of hundreds of nanometers was formed.

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