Scanning probe microscopy and nanoindentation studies of silicon carbonitride films obtained by PECVD from hexamethyldisilazane<br /><p align="center" style="text-align:center;mso-layout-grid-align:none;text-autospace:none" class="MsoNormal"><b><span lang="EN-US" style="font-size:16.0pt;letter-spacing:.25pt;mso-ansi-language:EN-US"><o:p></o:p></span></b></p>

V.R. Shayapov, M.N. Khomyakov, Y.M. Rumyantsev

Abstract

Silicon carbonitride films were deposited by PECVD from hexamethyldisilazane. Scanning probe microscopy was applied for surface investigation and roughness parameters determination. Mechanical properties (hardness, Young’s modulus and elastic recovery) of the films were studied by nanoindentation method. It was found that hardness and Young’s modulus are rising with deposition temperature increase. Elastic recovery is close to 100 % at low deposition temperature (lower than 250 °C) and tends to decrease with further synthesis temperature rise. The results are explained by increase in concentration of covalent bonds and other changes in chemical and phase composition. <p style="margin-bottom:6.0pt;text-align:justify;text-justify: inter-ideograph;mso-layout-grid-align:none;text-autospace:none" class="MsoNormal"><span lang="EN-US" style="font-size:9.0pt;letter-spacing:.25pt;mso-ansi-language:EN-US"><o:p></o:p></span></p>

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