Structure, microrelief and optical properties of chromium films deposited by sublimation in vacuum

V.A. Kochubey, V.V. Atuchin, L.D. Pokrovsky, I.S. Soldatenkov, I.B. Troitskaia, A.S. Kozhukhov, V.N. Kruchinin show affiliations and emails
Received 19 July 2013; Accepted 16 September 2013;
This paper is written in Russian
Citation: V.A. Kochubey, V.V. Atuchin, L.D. Pokrovsky, I.S. Soldatenkov, I.B. Troitskaia, A.S. Kozhukhov, V.N. Kruchinin. Structure, microrelief and optical properties of chromium films deposited by sublimation in vacuum. Lett. Mater., 2013, 3(4) 326-329
BibTex   https://doi.org/10.22226/2410-3535-2013-4-326-329

Abstract

In present study, the structure, microrelief and optical properties of thick nontransparent chromium films, deposited onto silica and silicon substrates using thermal evaporation from the especial thermostating evaporator, have been evaluated. The top surface layer of the films is amorphous as it is verified by RHEED. When chromium is deposited onto silica, rms parameter of AFM data is equal to 0.7 nm. The dispersive optical constants n and k of chromium films have been defined over spectral range 250-1100 nm by spectroscopic ellipsometry.

References (22)

1. C.W. Tan, J. Miao, Thin Solid Films. 517, 4921 (2009).
2. Ali Foroughi-Abari, Can Xu, Kenneth C. Cadien, ThinSolid Films. 520, 1762 (2012).
3. S.A. Chambers, Adv. Mat. 22, 219 (2010).
4. S.A. Chambers, M.H. Engelhard, V. Shutthanandan, et.al., Surf. Sci. Rep. 65, 317(2010).
5. C. Capan, G.Y. Sun, M.E. Boden, and S.A. Chambers, Appl. Phys. Lett. 100, 052106 (2012).
6. A.J. Hong, J. Kim, Y. Wang, et.al., J. Appl. Phys. 110, 054504 (2011).
7. T.I. Grigor’eva and T.Kh. Khasanov, Optics andSpectroscopy. 108(4), 591 (2010).
8. V.A. Kochubey, V.V. Atuchin, A.S. Kozhukhov, V.N.Kruchinin, L.D. Pokrovsky, Fundamental’nye problemysovremennogo materialovedenia. 10(2), 194 (2013) (inRussian) [В.А. Кочубей, В.В. Атучин, А.С. Кожухов, В.Н. Кручинин, Л.Д. Покровский, Фунд. пробл. совр.материаловед. 10(2), 194 (2013)].
9. T.A. Gavrilova, V.V. Atuchin, V.N. Kruchinin, D.V.Lychagin, Physics Procedia. 23, 61 (2012).
10. V.V. Atuchin, T.I. Grigorieva and L.D. Pokrovsky, Modern Physics Letters B. 26(5), 1150029 (2012).
11. V.V. Atuchin, T.A. Gavrilova, V.A. Kochubey, V.N.Kruchinin, L.D. Pokrovsky, Fundamental’nye problemysovremennogo materialovedenia. 8(4), 77 (2011) (inRussian) [В.В. Атучин, Т.А. Гаврилова, В.А. Кочубей, В.Н. Кручинин, Л.Д. Покровский, Фунд. пробл. совр.материаловед. 8(4), 77 (2011)].
12. V.A. Kochubey, V.V. Atuchin, V.N. Kruchinin, L.D.Pokrovsky, Fundamental’nye problemy sovremennogomaterialovedenia. 7(4), 77 (2010) (in Russian)[В.А. Кочубей, В.В. Атучин, В.Н. Кручинин, Л.Д.Покровский, Фунд. пробл. совр. материаловед., 7(4), 77 (2010)].
13. V.V. Atuchin, V.A. Kochubey, L.D. Pokrovsky, T.Kh.Khasanov, Fundamental’nye problemy sovremennogomaterialovedenia. 3(1), 22 (2006) (in Russian) [В.В.Атучин, В.А. Кочубей, Л.Д. Покровский, Т.Х.Хасанов, Фунд. пробл. совр. материаловед. 3(1), 22(2006)].
14. V.A. Kochubey, L.D. Pokrovsky, T.I. Grigorieva, Fundamental’nye problemy sovremennogomaterialovedenia. 2(3), 103 (2005) (in Russian) [В.А.Кочубей, Л.Д. Покровский, Т.И. Григорьева, Фунд.пробл. совр. материаловед. 2(3), 193 (2005)].
15. C.V. Ramana, R.S. Vemuri, V.V. Kaichev, V.A. Kochubey, A.A. Saraev, and V.V. Atuchin, Appl. Mater. Interfaces. 3, 4370 (2011).
16. V.V. Atuchin, B.M. Ayupov, V.A. Kochubey, L.D.Pokrovsky, C.V. Ramana, Yu.M. Rumiantsev, Opt. Mater.30, 1145 (2008).
17. C.V. Ramana, V.V. Atuchin, V.A. Kochubey, L.D.Pokrovsky, V. Shutthanandan, U. Becker, R.C. Ewing, Appl. Surf. Sci. 253, 5368 (2007).
18. V.A. Kochubey, V.V. Atuchin, T.A. Gavrilova, L.D.Pokrovsky, Kondensirovannie Sredy & MezhfaznieGranitsy, 11(4), 318 (2009) [В.А. Кочубей, В.В. Атучин, Т.А. Гаврилова, Л.Д. Покровский, Конденсированныесреды и межфазные границы, 11(4), 318 (2009)].
19. S.V. Rykhlitski, E.V. Spesivtsev, V.A. Shvets, V.Yu.Prokopiev, Instrum. Exper. Techniques. 2, 160 (2007)(in Russian) [С.В. Рыхлицкий, Е.В. Спесивцев, В, А, Швец, В.Ю. Прокопьев, ПТЭ. 2, 160 (2007)].
20. V.V. Atuchin, T. Khasanov, V.A. Kochubey, L.D.Pokrovsky, T.A. Gavrilova, Int. J. Modern Phys. 23(23), 4817 (2009).
21. V.V. Atuchin, A.V. Kalinkin, V.A. Kochubey, V.N.Kruchinin, R.S. Vemuri and C.V. Ramana, J. Vac. Sci.Tecnol. A29(2), 02104 (2011).
22. Ioffe Physical Technical Institute, RAS, Russia, n, kdatabase of NSM, http://www.ioffe.rssi.ru/SVA/NSM/nk/.

Cited by (3)

1.
V. M. Sklyarchuk, V. A. Gnatyuk, V. G. Pylypko, T. Aoki. Lecture Notes in Networks and Systems: Engineering for Sustainable Future, Chapter 16, p.159 (2020). Crossref
2.
A. A. Ashcheulov, A. V. Galochkin, I. S. Romanyuk, S. G. Dremluzhenko. ТКЭА. , 3 (2016). Crossref
3.
A. Sytchkova, A. Belosludtsev, L. Voloseviciene, R. Ju�kenas, R. Simni�kis. Optical Materials. 121, 111530 (2021). Crossref