Effect of annealing temperature on structure of electrodeposited nano-scale copper wires

Y. Ke1, T. Konkova2, S. Mironov3*, J. Onuki4§
1Graduate School of Science and Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
2Department of Materials Science and Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan ; Institute for Metals Superplasticity Problems, Russian Academy of Science, 39 Khalturin Str., Ufa, 450001, Russia
3Department of Materials Processing, Graduate School of Engineering, Tohoku University, 6-6-02 Aramaki-aza-Aoba, Sendai 980-8579, Japan; Institute for Metals Superplasticity Problems, Russian Academy of Science, 39 Khalturin Str., Ufa, 450001, Russia
4Department of Materials Science and Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
Abstract
High-resolution electron backscatter diffraction (EBSD) technique was employed to investigate structure evolution of electrodeposited and subsequently annealed in wide temperature interval nano-scale copper wires. The grain structure was shown to be stable in the bottom area of a trench after annealing. The wires were shown to exhibit a large fraction of low-angle boundaries as well as annealing twins.
Received: 29 October 2012   Revised: 28 November 2012   Accepted: 19 December 2012
Views: 81   Downloads: 8
References
1.
C.M. Tan and G. Zhang. Ž in Solid Films 462-463, 263(2004).
2.
D. Kwon, H. Park and C. Lee. Ž in solid Films 475, 58(2005).
3.
J. Onuki, S. Tashiro, K. Khoo, N. Ishikawa, T. Kimura,Y. Chonan, and H. Akahoshi. Journal of theElectrochemical Society 157 (9), H857 (2010).
4.
M. Stangl, J. Acker, S. Oswald, M. Uhlemann, T.Gemming, S. Baunack, and K. Wertzig. MicroelectronicEng. 84, 54 (2007).
5.
W. Zhang, S.H. Brongersma, N. Heylen, G. Beyer, W.Vandervorst, and K. Maex. J. Electrochem. Soc. 152,C832 (2005).
6.
F.J. Humphreys. J. Microscopy 195, 170 (1999).
7.
T.B. Vaughan. Electrochimica Acta 4, 72 (1961).
8.
F.J. Humphreys, M. Hatherly. Recrystallization and relatedphenomena, Elsevier, 2004, 574 pp.
9.
Ye.V. Nesterova, V.V. Rybin. Phys. Met. Metall. 59, 169(1985).